Paper Title:
Preparation of TiN-Based Nitride Composite Films from Alkoxide Solution by Liquid Injection Thermal Plasma CVD Method
  Abstract

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Periodical
Key Engineering Materials (Volumes 264-268)
Main Theme
Edited by
Hasan Mandal and Lütfi Öveçoglu
Pages
49-52
DOI
10.4028/www.scientific.net/KEM.264-268.49
Citation
S. Shimada, K. Tsukurimichi, Y. Takada, J. Tsujino, "Preparation of TiN-Based Nitride Composite Films from Alkoxide Solution by Liquid Injection Thermal Plasma CVD Method ", Key Engineering Materials, Vols. 264-268, pp. 49-52, 2004
Online since
May 2004
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