Preparation of TiN-Based Nitride Composite Films from Alkoxide Solution by Liquid Injection Thermal Plasma CVD Method |
| Journal |
Key Engineering Materials (Volumes 264 - 268) |
| Volume |
Euro Ceramics VIII |
| Edited by |
Hasan Mandal and Lütfi Öveçoglu |
| Pages |
49-52 |
| DOI |
10.4028/www.scientific.net/KEM.264-268.49 |
| Citation |
Shiro Shimada et al., 2004, Key Engineering Materials, 264-268, 49 |
| Online since |
May, 2004 |
| Authors |
Shiro Shimada, K. Tsukurimichi, Yusuke Takada, J. Tsujino |
| Keywords |
Alkoxide Solution, Chemical Vapour Deposition (CVD), Composite Film, Liquid Injection, Nitride, Plasma, Titanium Nitride TiN |
| Full Paper |
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