Preparation and Characterization of Lead Zirconate Titanate Thin Films on Si Substrate by Metal-Organic Chemical Vapor Deposition |
| Journal |
Key Engineering Materials (Volume 269) |
| Volume |
Electroceramics in Japan VII |
| Edited by |
M. Miyayama, T. Takenaka, M. Takata and K. Shinozaki |
| Pages |
61-64 |
| DOI |
10.4028/www.scientific.net/KEM.269.61 |
| Citation |
Atsushi Sakurai et al., 2004, Key Engineering Materials, 269, 61 |
| Online since |
August, 2004 |
| Authors |
Atsushi Sakurai, Toshiyuki Nakaiso, Kunio Nishida, Akira Ando, Yukio Sakabe |
| Keywords |
Gradient-Composition Layer, Lead Zirconate Titanate, Metal-Organic Chemical Vapor Deposition, Silicon, Thin Film |
| Full Paper |
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