Paper Title:
Preparation and Characterization of Lead Zirconate Titanate Thin Films on Si Substrate by Metal-Organic Chemical Vapor Deposition
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Periodical
Edited by
M. Miyayama, T. Takenaka, M. Takata and K. Shinozaki
Pages
61-64
DOI
10.4028/www.scientific.net/KEM.269.61
Citation
A. Sakurai, T. Nakaiso, K. Nishida, A. Ando, Y. Sakabe, "Preparation and Characterization of Lead Zirconate Titanate Thin Films on Si Substrate by Metal-Organic Chemical Vapor Deposition", Key Engineering Materials, Vol. 269, pp. 61-64, 2004
Online since
August 2004
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