Paper Title:
Fabrication of a High-Aspect-Ratio Nano Tip Integrated Micro Cantilever with a ZnO Piezoelectric Actuator
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Periodical
Key Engineering Materials (Volumes 270-273)
Edited by
Seung-Seok Lee, Dong-Jin Yoon, Joon-Hyun Lee and Sekyung Lee
Pages
1095-1100
DOI
10.4028/www.scientific.net/KEM.270-273.1095
Citation
S. H. Lee, S. S. Lee, J.J. Choi, J. U. Jeon, K. Ro, "Fabrication of a High-Aspect-Ratio Nano Tip Integrated Micro Cantilever with a ZnO Piezoelectric Actuator ", Key Engineering Materials, Vols. 270-273, pp. 1095-1100, 2004
Online since
August 2004
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