Paper Title:
Non-Destructive Characteristics Evaluation for Low Vacuum Dry Pumps in the Semi-Conductor Manufacturing Process Line
  Abstract

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Periodical
Key Engineering Materials (Volumes 270-273)
Edited by
Seung-Seok Lee, Dong-Jin Yoon, Joon-Hyun Lee and Sekyung Lee
Pages
2345-2350
DOI
10.4028/www.scientific.net/KEM.270-273.2345
Citation
J. Y. Lim, W. S. Cheung, K. H. Chung, "Non-Destructive Characteristics Evaluation for Low Vacuum Dry Pumps in the Semi-Conductor Manufacturing Process Line ", Key Engineering Materials, Vols. 270-273, pp. 2345-2350, 2004
Online since
August 2004
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