Paper Title:
A Method for Quantitative Evaluation of Electrical Conductivity of Silicon Wafers by Millimeter-Waves
  Abstract

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Periodical
Key Engineering Materials (Volumes 270-273)
Edited by
Seung-Seok Lee, Dong-Jin Yoon, Joon-Hyun Lee and Sekyung Lee
Pages
41-45
DOI
10.4028/www.scientific.net/KEM.270-273.41
Citation
Y. Ju, Y. Ohno, M. Saka, "A Method for Quantitative Evaluation of Electrical Conductivity of Silicon Wafers by Millimeter-Waves ", Key Engineering Materials, Vols. 270-273, pp. 41-45, 2004
Online since
August 2004
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$32.00
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