A Method for Quantitative Evaluation of Electrical Conductivity of Silicon Wafers by Millimeter-Waves |
| Journal |
Key Engineering Materials (Volumes 270 - 273) |
| Volume |
Advances in Nondestructive Evaluation |
| Edited by |
Seung-Seok Lee, Dong-Jin Yoon, Joon-Hyun Lee and Sekyung Lee |
| Pages |
41-45 |
| DOI |
10.4028/www.scientific.net/KEM.270-273.41 |
| Citation |
Yang Ju et al., 2004, Key Engineering Materials, 270-273, 41 |
| Online since |
August, 2004 |
| Authors |
Yang Ju, Yasushi Ohno, Masumi Saka |
| Keywords |
Calibration, Conductivity, Millimeter-Wave, Quantitative Evaluation, Silicon Wafer |
| Full Paper |
Get the full paper by clicking here
|
