Paper Title:
Electrical and Optical Properties of SiOC Films with Low Dielectric Constant
  Abstract

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Periodical
Key Engineering Materials (Volumes 270-273)
Edited by
Seung-Seok Lee, Dong-Jin Yoon, Joon-Hyun Lee and Sekyung Lee
Pages
814-819
DOI
10.4028/www.scientific.net/KEM.270-273.814
Citation
Y. H. Yu, H. J. Ko, C. K. Choi, "Electrical and Optical Properties of SiOC Films with Low Dielectric Constant", Key Engineering Materials, Vols. 270-273, pp. 814-819, 2004
Online since
August 2004
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