Paper Title:
Design of Vertical Type Thermal CVD Reactor with Rotating-Disk for New Generation Semiconductor Processes
  Abstract

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Periodical
Key Engineering Materials (Volumes 270-273)
Edited by
Seung-Seok Lee, Dong-Jin Yoon, Joon-Hyun Lee and Sekyung Lee
Pages
860-865
DOI
10.4028/www.scientific.net/KEM.270-273.860
Citation
H. J. Kim, A. Yoshida, S. B. Lee, K. S. Kim, "Design of Vertical Type Thermal CVD Reactor with Rotating-Disk for New Generation Semiconductor Processes ", Key Engineering Materials, Vols. 270-273, pp. 860-865, 2004
Online since
August 2004
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$35.00
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