Paper Title:
Diagnosis and Reduction of Robot Arm Vibration for 12-Inch Wafer Spin Scrubber
  Abstract

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Periodical
Key Engineering Materials (Volumes 270-273)
Edited by
Seung-Seok Lee, Dong-Jin Yoon, Joon-Hyun Lee and Sekyung Lee
Pages
884-889
DOI
10.4028/www.scientific.net/KEM.270-273.884
Citation
N. Y. Kim, M. S. Hong, "Diagnosis and Reduction of Robot Arm Vibration for 12-Inch Wafer Spin Scrubber", Key Engineering Materials, Vols. 270-273, pp. 884-889, 2004
Online since
August 2004
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