Paper Title:

Maskless Fabrication of a Hyperfine Silicon Stamper and Its Application to the PDMS Rheology Casting Process

Periodical Key Engineering Materials (Volumes 274 - 276)
Main Theme Advances in Engineering Plasticity and Its Applications
Edited by W.P. Shen and J.Q. Xu
Pages 445-450
DOI 10.4028/www.scientific.net/KEM.274-276.445
Citation S.W. Youn et al., 2004, Key Engineering Materials, 274-276, 445
Online since October, 2004
Authors S.W. Youn, Chung Gil Kang
Keywords Nanoscratch, PDMS (Polydimethylsiloxane), Si(100), Wet Etching
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