Paper Title:
Maskless Fabrication of a Hyperfine Silicon Stamper and Its Application to the PDMS Rheology Casting Process
  Abstract

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Periodical
Key Engineering Materials (Volumes 274-276)
Edited by
W.P. Shen and J.Q. Xu
Pages
445-450
DOI
10.4028/www.scientific.net/KEM.274-276.445
Citation
S.W. Youn, C. G. Kang, "Maskless Fabrication of a Hyperfine Silicon Stamper and Its Application to the PDMS Rheology Casting Process ", Key Engineering Materials, Vols. 274-276, pp. 445-450, 2004
Online since
October 2004
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$32.00
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