Paper Title:
Maskless Fabrication of a Hyperfine Silicon Stamper and Its Application to the PDMS Rheology Casting Process
| Periodical |
Key Engineering Materials (Volumes 274 - 276)
|
| Main Theme |
Advances in Engineering Plasticity and Its Applications
|
| Edited by |
W.P. Shen and J.Q. Xu |
| Pages |
445-450 |
| DOI |
10.4028/www.scientific.net/KEM.274-276.445 |
| Citation |
S.W. Youn et al., 2004, Key Engineering Materials, 274-276, 445 |
| Online since |
October, 2004 |
| Authors |
S.W. Youn, Chung Gil Kang |
| Keywords |
Nanoscratch, PDMS (Polydimethylsiloxane), Si(100), Wet Etching |
| Price |
US$ 28,- |