Paper Title:
Enhanced Sensitivity of the Pirani Vacuum Gauge by the AC Driving Method
  Abstract

We improved the sensitivity of existing commercial Pirani-vacuum gauges employing the AC method in the vacuum range above 1 Torr. The signals obtained through the use of the AC method yield information related to the specific heat and heat conductivity of gas. The output signal is obtained by two components: the oscillating temperature amplitude, and its phase. The amplitude increases with the decrease of pressure in the vacuum range from the atmosphere to about 1 Torr, which arises from the decrease of the heat capacity with the decrease of gas density. In contrast, the phase decreases monotonically as pressure decreases and the slop of a dΘ/d(log P) is large at higher than 1 Torr. This provides a good advantage for developing a new Pirani gauge with high sensitivity.

  Info
Periodical
Key Engineering Materials (Volumes 277-279)
Edited by
Kwang Hwa Chung, Yong Hyeon Shin, Sue-Nie Park, Hyun Sook Cho, Soon-Ae Yoo, Byung Joo Min, Hyo-Suk Lim and Kyung Hwa Yoo
Pages
990-994
DOI
10.4028/www.scientific.net/KEM.277-279.990
Citation
D. J. Seong, Y. H. Shin, K. H. Chung, D.H. Kim, J. S. Shin, Y.J. Yun, "Enhanced Sensitivity of the Pirani Vacuum Gauge by the AC Driving Method", Key Engineering Materials, Vols. 277-279, pp. 990-994, 2005
Online since
January 2005
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$32.00
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