Paper Title:
Polycrystalline Silicon Thin Films on SiC Substrates for Solar Cells
  Abstract

The thin-film of silicon deposited by RTCVD on pressureless sintered SiC substrate with the size of 30mm×20mm, which is cleaned by ultrasonic method and chemical treatment. The crystal size of silicon columnar grain can reach 190 µm and its preferred orientation is [111] after ZMR process.

  Info
Periodical
Key Engineering Materials (Volumes 280-283)
Edited by
Wei Pan, Jianghong Gong, Chang-Chun Ge and Jing-Feng Li
Pages
1147-1148
DOI
10.4028/www.scientific.net/KEM.280-283.1147
Citation
H. F. Li, Y. Huang, Z. J. Wan, H. X. Zhang, L. M. Zhang, Y. Xu, X. D. Li, "Polycrystalline Silicon Thin Films on SiC Substrates for Solar Cells", Key Engineering Materials, Vols. 280-283, pp. 1147-1148, 2005
Online since
February 2007
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