The molybdenum powder doped with rare earth oxide was processed by powder metallurgy method and a new style thin film cathode material was firstly processed by Spark Plasma Sintering (SPS) method in this paper. The secondary emission property of such kind of cathode materials were studied, the maxim secondary emission coefficient after the material was activated at 1600°C reached to 3.84 about double that of traditional cathode materials application in magneto. The microstructure, element analysis and phase constitution of materials before and after the secondary emission property was measured were studied through SEM, EDAX and XRD. The results show that a rare earth layer about 5um thickness was created after the material was activated at 1600°C. The material grain size is about 1 um or even smaller and the distribution of elements in such materials is even.