Paper Title:
Preparation of (111)-Oriented Pt Electrode Films with Quasi-Monocrystal Properties on MgO/TiN Buffered Si(100) by PLD
  Abstract

Atomic-scale smooth Pt electrode films have been deposited on MgO/TiN buffered Si (100) by the pulsed laser deposition (PLD) technique. The whole growth process of the multilayer films was monitored by using in-situ reflection high energy electron diffraction (RHEED) apparatus. The Pt/MgO/TiN/Si(100) stacked structure was also characterized by X-ray diffraction (XRD), atomic force microscopy (AFM) and scanning electron microscopy (SEM). The HREED observations show that the growth mode of the Pt electrode film is 2D layer-by-layer growth. It is found that the (111)-oriented Pt electrode film has a crystallinity comparable to that of monocrystals. The achievement of the quasi-single-crystal Pt electrode film with an atomic-scale smooth surface is ascribed to the improved crystalline quality of the MgO film.

  Info
Periodical
Key Engineering Materials (Volumes 280-283)
Edited by
Wei Pan, Jianghong Gong, Chang-Chun Ge and Jing-Feng Li
Pages
823-826
DOI
10.4028/www.scientific.net/KEM.280-283.823
Citation
T. L. Chen, X. M. Li, "Preparation of (111)-Oriented Pt Electrode Films with Quasi-Monocrystal Properties on MgO/TiN Buffered Si(100) by PLD", Key Engineering Materials, Vols. 280-283, pp. 823-826, 2005
Online since
February 2007
Keywords
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Tomoaki Futakuchi, Yuichi Sakai, Takashi Iijima, Masatoshi Adachi
Abstract:Piezoelectric actuators were prepared by the screen printing of piezoelectric thick films and the wet etching of Si substrates for the...
45
Authors: P. Prachopchok, Chanchana Thanachayanont, K. Sriprapha, A. Heawchin, S. Kaewket, P. Vijitjanya, C. Sac-Kung, Tanakorn Osotchan
Abstract:In dye sensitized solar cell structure, the transparent electrodes of tin oxide doped fluorine (SnO2:F) was coated by titanium dioxide (TiO2)...
587
Authors: Xiao Jiao Yu, A Man Zhang, Jian Zhang, Jie Zhao, Bing Hua Yao, Guang Jun Liu
Abstract:Cu2O thin films is preparated through electrodeposition with conductive glass of coating indium tin oxide as work electrode.The...
371
Authors: Zhen Ting Wang, Gang Liang, Guo Gang Zhao
Abstract:In the surface of graphite electrode, the in-situ synthesized high temperature antioxidation composite coating is prepared, depending on...
42
Authors: Xiao Wen Wu, Jian Xin Zhang, Yang Wang, Amin Huang
Chapter 15: Surface Engineering/Coatings
Abstract:In this paper, TiN coating as an interlayer was fabricated on Ti substrate by reactive plasma spray. Ti/TiN/Sb-SnO2 electrodes were prepared...
1613