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Preparation and Electrical Properties of (100) Preferred (Ba,Sr)TiO3 Bilayer Thin Films Derived from Pulse Laser Deposition Method

Journal Key Engineering Materials (Volumes 280 - 283)
Volume High-Performance Ceramics III
Edited by Wei Pan, Jianghong Gong, Chang-Chun Ge and Jing-Feng Li
Pages 849-852
DOI 10.4028/www.scientific.net/KEM.280-283.849
Citation Sheng Guo Lu et al., 2007, Key Engineering Materials, 280-283, 849
Online since February, 2007
Authors Sheng Guo Lu, Philip A. Friddle, Z.K. Xu, G.G. Siu, Haydn Chen, K.H. Wong, C.L. Mak
Keywords Barium Strontium Titanate, Preferred Orientation, Pulsed Laser Deposition (PLD), Thin Film
Abstract

Bilayer Ba0.6Sr0.4TiO3 - Ba0.4Sr0.6TiO3 and Ba0.4Sr0.6TiO3 - Ba0.6Sr0.4TiO3 thin films were deposited on the LaNiO3-buffered Pt/Ti/SiO2/Si substrates using pulse laser deposition method. A (100)preferred orientation was obtained. The structure was characterized using x-ray diffraction (XRD) and Raman spectroscopy. The leakage current, and dielectric permittivity versus temperature were characterized. Results indicated that the (100) preferred bilayer structure had less leakage current and smaller loss tangent, which was in favor of enhancing the quality of thin film used as microwave dielectrics.

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