SiC materials have been extensively studied for high temperature components in advanced energy system and advanced gas turbine. SiCf/SiC composites are promising for various structural materials. But, high temperature and pressure lead to the degradation of the reinforcing fiber during the hot pressing. Therefore, reduction of the process temperature and pressure is key requirements for the fabrication of SiCf/SiC composites by hot pressing method. In the present work, monolithic LPS-SiC was fabricated by hot pressing method at various temperatures. The starting powder was high purity β-SiC nano-powder with an average particle size of 30nm. Compositions of sintering additives were Al2O3 / Y2O3 = 0.7 and 1.5 (wt.%). Monolithic LPS-SiC was evaluated in terms of sintering density, micro-structure, flexural strength, elastic modulus and so on. Sintered density, flexural strength and elastic modulus of fabricated LPS-SiC increased with increasing the process temperature. Particularly, relative density of LPS-SiC fabricated at 1820oC with additive composition of Al2O3/Y2O3=1.5(wt.%) was 95%. Also, flexural strength and elastic modulus were 900MPa and 220GPa, respectively. In the fracture surface of this specimen, the size and shape of SiC grains grew up and changed. Also, tortuous crack paths and occurrence of interfacial debonding were observed.