When a light-excitation substance such as a high polymer absorbs the light energy of an ultraviolet ray, it will be excited. If this substance reacts with the processing material in an atomic order under the excited conditions, it may be available for use in fine processing. Thus, it appears that the processing in a sub-nanometer order may be realized by a phenomenon called luminescence. The following merits can be considered: 1) little reaction heat, 2) little heat influence on the processed material, 3) easy reaction control in comparison with chemical processing. In this research, the processing principle was verified by dipping the processing material for a fixed time in pure water mixed the fluorescent substance exposed to an ultraviolet ray. The surface of copper that had been precisely lapped was used in the experiment. The abrasion of its surface was observed by AFM. Based on the results of these basic experiments, an ultraviolet-ray irradiation type polisher was manufactured for use in the polishing experiment of copper. This paper describes the polishing characteristics of copper exposed to an ultraviolet ray.