Paper Title:
Polishing Characteristics of ELID-Ground Surface of Nano Precision Optical Elements
  Abstract

This paper describes an ultra precision polishing method of aspherical mirrors, and the fundamental research on polishing characteristics. The aspherical mirrors with a diameter of about 30mm made by fused silica glass and CVD-SiC were ELID (electrolytic in-process dressing)-ground to high form accuracy with #4000 cast iron bonded diamond wheel, and then polished with a small polishing tool. As the result, final surface roughness of 1.4nmRa and form accuracy of 1.2 μm was obtained.

  Info
Periodical
Key Engineering Materials (Volumes 291-292)
Edited by
Yury M. Baron, Jun'ichi Tamaki and Tsunemoto Kuriyagawa
Pages
365-370
DOI
10.4028/www.scientific.net/KEM.291-292.365
Citation
W. M. Lin, H. Ohmori, T. Suzuki, Y. Uehara, S. MORITA, "Polishing Characteristics of ELID-Ground Surface of Nano Precision Optical Elements", Key Engineering Materials, Vols. 291-292, pp. 365-370, 2005
Online since
August 2005
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