Paper Title
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Authors: Shinya Suzuki, Nobuhito Yoshihara, Tsunemoto Kuriyagawa
Abstract:In recent years, there has been a great demand for large-diameter wafers with high flatness of hard and brittle materials that are used as...
359
Authors: Wei Min Lin, Hitoshi Ohmori, T. Suzuki, Yoshihiro Uehara, Shinya MORITA
Abstract:This paper describes an ultra precision polishing method of aspherical mirrors, and the fundamental research on polishing characteristics....
365
Authors: T. Saito, S. Ito, Y. Mizukami, O. Horiuchi
Abstract:Recently a technique has been developed to mold aspheric glass lenses by using cemented carbide dies at elevated temperature. The dies are...
371
Authors: S. Koshimizu
Abstract:A non-contact method of measuring the surface roughness and the thickness of polished silicon wafers using an infrared laser is proposed. The...
377
Authors: S.H. Hong, H. Isii, Mutsumi Touge, Junji Watanabe
Abstract:The GaAs wafer is widely applied to semiconductor element related to telecommunication and semiconductor laser. In this research, novel fine...
381
Authors: Nobuo Yasunaga
Abstract:The mechanism of the mechanochemical polishing of Si wafers with BaCO3, CaCO3 and ZnO abrasives was investigated by polishing experiments...
385
Authors: Zhen Yuan Jia, Jian Xiu Su, Zhu Ji Jin, Dong Ming Guo, L.P. Li
Abstract:The friction force of wafer surface plays an important role in removing material of wafer surface and the friction force distribution on...
389
Authors: Dong Ming Guo, X.J. Li, Zhu Ji Jin, Ren Ke Kang
Abstract:The slurry of Copper chemical mechanical planarization for ultra large-scale integrate circuit (ULSI) usually contains oxidizer, etchant,...
395
Authors: S. Miyake, M. Wang, J. Kim
Abstract:Nanometer-scale protuberance and groove processing was performed on a silicon (Si) surface by diamond tip sliding using atomic force...
401
Authors: M. Wang, S. Miyake
Abstract:To realize ultrahigh density recording in high precision using polycarbonate as a recording media, the nanometer-scale mechanical processing...
407
Showing 61 to 70 of 115 Paper Titles