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Authors: Taeho Ha, Takashi Miyoshi, Yasuhiro Takaya, S. Takahashi
Abstract:Laser scattering characteristics of typical CMP-induced defects such as particles and microscratches with the size of sub-micron order are...
3
Authors: Xian Ping Liu, J. Zhang
Abstract:A novel measurement system, the multi-functional Tribological Probe Microscope (TPM), has been developed to provide multi-function...
9
Authors: S. Takahashi, R. Nakajima, Takashi Miyoshi, Yasuhiro Takaya, Kiyoshi Takamasu
Abstract:In order to reduce and control yield loss in the fabrication process of next generation ULSI devices, nano-defects inspection technique for...
15
Authors: Hang Yin Ling, Alan Kin Tak Lau, Li Cheng, J. Wei, R.S. Thomson, M.L. Scott
Abstract:A comparison of strain measurement results, from an embedded fibre-optic Bragg grating (FBG) sensor and surface mounted strain gauge, at...
21
Authors: Evgeny S. Lukin, Alexander M. Ivanov
Abstract:A method of the thermovision study for solving the problems of the experimental mechanics is presented. The method of the experimental study...
27
Authors: L.H. Yam, Li Cheng, Z. Wei, Y.J. Yan
Abstract:A study on the use of modal parameter analysis for damage detection of structures made of composites is conducted. The damage-induced...
33
Authors: Ling Xue Kong, Z. Peng
Abstract:Nonisothermal crystallization behaviors of PVA and poly (vinyl alcohol) and Silica (PVA/SiO2) nanocomposites prepared via a self-assembly...
39
Authors: A.V. Vasev, S.I. Chikichev
Abstract:Structural and optical properties of MBE-grown GaAs(001) surface have been studied by reflection high-energy electron diffraction and...
45
Authors: Ho Chang, Chih Hung Lo, Tsing Tshih Tsung, Y.Y. Cho, D.C. Tien, Liang Chia Chen, C.H. Thai
Abstract:This study aims to investigate the temperature effect on particle size of copper oxide nanofluid produced under optimal parameters of the...
51
Authors: Y.M. Liu, W.J. Tian, S.J. Zhang
Abstract:The Young’s modulus of micromechanical silicon films is very different from bulk silicon structures. It is very meaningful to test Young’s...
57
Showing 1 to 10 of 123 Paper Titles