Paper Title:
Micro Angle Measurement for a Scanning Stage
  Abstract

Long range scanning stages with very small positioning errors are the key elements in the nano-CMM that is used to determine the sizes and coordinates of micromachines and parts in three dimensions to realize MEMS/nano technology. A transmission stage needs six degree-of-freedom precision motion controls. A compact critical angle sensor (CAS) can be mounted on the base or frame to be used to monitor the orientation parameters of the scanning/transmission stage along the 3 axes and feedback the error signal of the sensor output to maintain the stage moving performance. By calibration with an autocollimator, the resolution is better than 0.1 arcsec with a measurement range above 600 arcsec.

  Info
Periodical
Key Engineering Materials (Volumes 295-296)
Edited by
Yongsheng Gao, Shuetfung Tse and Wei Gao
Pages
119-124
DOI
10.4028/www.scientific.net/KEM.295-296.119
Citation
Q. G. Liu, M. Li, D.C. Li, Z.G. Li, X.T. Hu, "Micro Angle Measurement for a Scanning Stage", Key Engineering Materials, Vols. 295-296, pp. 119-124, 2005
Online since
October 2005
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Price
$32.00
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