Paper Title:
A Two-Color Heterodyne Interferometer Based on Diffraction Grating for Displacement Measurement
  Abstract

A two-color heterodyne interferometer based on the movement of the optical diffraction grating is proposed. The method allows us to measure the phase of synthetic wavelength f s directly and with high accuracy to extend the range of unambiguity for interferometric measurements by using two close wavelengths. Our experiment results show that the uncertainty in displacement measurement caused by the uncertainty in f s is 0.20 µm, smaller than the half of a single wavelength we used. The fringe order of a single wavelength can be determined without ambiguity. The uncertainty in displacement measurement can be improved further by using a single wavelength.

  Info
Periodical
Key Engineering Materials (Volumes 295-296)
Edited by
Yongsheng Gao, Shuetfung Tse and Wei Gao
Pages
189-194
DOI
10.4028/www.scientific.net/KEM.295-296.189
Citation
G.H. Wu, Z.J. Cai, L. J. Zeng, "A Two-Color Heterodyne Interferometer Based on Diffraction Grating for Displacement Measurement", Key Engineering Materials, Vols. 295-296, pp. 189-194, 2005
Online since
October 2005
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Price
$35.00
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