Paper Title:
Accurate Estimation of Phase Distribution on Reference Plane in Grating Projection Measurement
  Abstract

A binary second order rational polynomial is adopted to simulate and extend the phase distribution on reference plane. In order to get the coefficients of the polynomial accurately, iterative least-square method based on the first order Taylor series expansion is used. The effect of the real reference plane profile error on measuring result is reduced by using extended unwrapped phase to substitute the original unwrapped phase. The effects of the random phase error and the system geometrical parameter error are decreased. The measuring accuracy of the system is improved. The principle of the 3D profile measuring system based on grating projection, the theoretic analysis for accurate estimate of phase distribution on reference plane, and the experimental results are presented.

  Info
Periodical
Key Engineering Materials (Volumes 295-296)
Edited by
Yongsheng Gao, Shuetfung Tse and Wei Gao
Pages
221-226
DOI
10.4028/www.scientific.net/KEM.295-296.221
Citation
M.R. Zhao, Y. C. Lin, X.B. Niu, D.M. Cheng, "Accurate Estimation of Phase Distribution on Reference Plane in Grating Projection Measurement", Key Engineering Materials, Vols. 295-296, pp. 221-226, 2005
Online since
October 2005
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Price
$32.00
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