Paper Title:
A Circular Profile Measurement Method Using Software Techniques
  Abstract

In industry, disk type products with a highly accurate surface such as silicon wafer and hard disk, are important elements. To measure these surfaces, an interferometer is used. However, this method generally needs a highly accurate reference surface. Another method to obtain the disk surface profile is by a scanning displacement sensor. However, the output of this sensor is influenced by the parasitic motions of the scanning along the reference guide. This article presents novel measurement procedures, a reversal method, an improved reversal method and a multi-prove method, to measure the circular profile on a disk without any references but with high accuracy.

  Info
Periodical
Key Engineering Materials (Volumes 295-296)
Edited by
Yongsheng Gao, Shuetfung Tse and Wei Gao
Pages
265-270
DOI
10.4028/www.scientific.net/KEM.295-296.265
Citation
E. Okuyama, K. Mitsui, "A Circular Profile Measurement Method Using Software Techniques", Key Engineering Materials, Vols. 295-296, pp. 265-270, 2005
Online since
October 2005
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Price
$35.00
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