Paper Title:
Development of a Sensitive Probe for Coordinate Measuring Machines
  Abstract

Requirement for precision measurement becomes extremely advanced as industrial needs advances. CMM (Coordinate Measuring Machine) is one of the most adequate measuring machines to meet the requirement. As the precision of CMM becomes higher, it is important to improve the sensitivity of probe. We developed a contact type probe which consisted of a QPD (quadratic photo diode), a ball lens, and a laser diode to detect the displacement of stylus. The probe system has a resolution of 31nm.

  Info
Periodical
Key Engineering Materials (Volumes 295-296)
Edited by
Yongsheng Gao, Shuetfung Tse and Wei Gao
Pages
325-330
DOI
10.4028/www.scientific.net/KEM.295-296.325
Citation
M. Watanabe, R. Furutani, "Development of a Sensitive Probe for Coordinate Measuring Machines", Key Engineering Materials, Vols. 295-296, pp. 325-330, 2005
Online since
October 2005
Keywords
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