Paper Title:

A High Precision Dynamic Autocollimator

Periodical Key Engineering Materials (Volumes 295 - 296)
Main Theme Measurement Technology and Intelligent Instruments VI
Edited by Yongsheng Gao, Shuetfung Tse and Wei Gao
Pages 337-342
DOI 10.4028/www.scientific.net/KEM.295-296.337
Citation M.Z. Shen et al., 2005, Key Engineering Materials, 295-296, 337
Online since October, 2005
Authors M.Z. Shen, Shu Tao Liao
Keywords Angular Measurement, Dynamic Autocollimator, Non-Contact Measurement, Optical Measurement
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Abstract

In order to increase the precision of a high speed dynamic autocollimator, which uses quadrate detector, we propose a new method to compensate the residual measuring errors. For this purpose, a multi-tooth rotary table with precision of 0.2 seconds of arc is used to calibrate the autocollimator. From the calibration data, a polynomial interpolation compensation algorithm is used. As a result, the measuring accuracy is increased to the order of 0.8 seconds of arc and the sampling speed is not affected.