Paper Title:
A High Precision Dynamic Autocollimator
  Abstract

In order to increase the precision of a high speed dynamic autocollimator, which uses quadrate detector, we propose a new method to compensate the residual measuring errors. For this purpose, a multi-tooth rotary table with precision of 0.2 seconds of arc is used to calibrate the autocollimator. From the calibration data, a polynomial interpolation compensation algorithm is used. As a result, the measuring accuracy is increased to the order of 0.8 seconds of arc and the sampling speed is not affected.

  Info
Periodical
Key Engineering Materials (Volumes 295-296)
Edited by
Yongsheng Gao, Shuetfung Tse and Wei Gao
Pages
337-342
DOI
10.4028/www.scientific.net/KEM.295-296.337
Citation
M.Z. Shen, S. T. Liao, "A High Precision Dynamic Autocollimator", Key Engineering Materials, Vols. 295-296, pp. 337-342, 2005
Online since
October 2005
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