A High Precision Dynamic Autocollimator
| Periodical | Key Engineering Materials (Volumes 295 - 296) |
|---|---|
| Main Theme | Measurement Technology and Intelligent Instruments VI |
| Edited by | Yongsheng Gao, Shuetfung Tse and Wei Gao |
| Pages | 337-342 |
| DOI | 10.4028/www.scientific.net/KEM.295-296.337 |
| Citation | M.Z. Shen et al., 2005, Key Engineering Materials, 295-296, 337 |
| Online since | October, 2005 |
| Authors | M.Z. Shen, Shu Tao Liao |
| Keywords | Angular Measurement, Dynamic Autocollimator, Non-Contact Measurement, Optical Measurement |
| Price | US$ 28,- |
In order to increase the precision of a high speed dynamic autocollimator, which uses quadrate detector, we propose a new method to compensate the residual measuring errors. For this purpose, a multi-tooth rotary table with precision of 0.2 seconds of arc is used to calibrate the autocollimator. From the calibration data, a polynomial interpolation compensation algorithm is used. As a result, the measuring accuracy is increased to the order of 0.8 seconds of arc and the sampling speed is not affected.