Paper Title:
Anti-Vibration Characteristics of a Lateral Shear Interferometer for On-Machine Surface Measurement
  Abstract

Lateral shear interferometers have large measurement range and good anti-disturbance ability. They have similar accuracy compared with the reference based interferometers. Based on a specially designed shear generator, a new lateral shear interferometer is proposed. The new system has a complete common optical path and a simple mechanism. The optical model of the interferometer is presented and the anti-vibration characteristics are analyzed. To validate its antivibration ability for on-machine surface measurement, experimental tests have been conducted and results presented.

  Info
Periodical
Key Engineering Materials (Volumes 295-296)
Edited by
Yongsheng Gao, Shuetfung Tse and Wei Gao
Pages
411-416
DOI
10.4028/www.scientific.net/KEM.295-296.411
Citation
X. Liu, Y. Gao, S. To, W. B. Lee, "Anti-Vibration Characteristics of a Lateral Shear Interferometer for On-Machine Surface Measurement", Key Engineering Materials, Vols. 295-296, pp. 411-416, 2005
Online since
October 2005
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Shyh Tsong Lin, T.L. Lin
Abstract:This paper introduces a dual-path Mach-Zehnder interferometer for determining refractive index and geometrical thickness of an optical...
97
Authors: Eiki Okuyama, Tomoaki Yamasuge
Abstract:In this article, a new interferometer which accuracy does not depend on the accuracy of the reference is proposed. This interferometer...
279
Authors: Wen Mei Hou, Xiao Ren
Abstract:The demands of nano-measurement and nano-positioning now in research and industries become the challenge for heterodyne interferometer...
303
Authors: Jie Li, Ling Feng Chen
Abstract:The point diffraction interferometer (PDI), which generates the nearly ideal spherical wavefront with the pinhole method, is realized the...
4045
Authors: Wan Duo Wu, Qiang Xian Huang, Chao Qun Wang, Ting Ting Wu, Hong Xie
Abstract:The technique utilizing single-frequency laser interferometry has very high measurement accuracy, but it has rigorous requirements for...
129