Paper Title:
Advances in Micro and Nano-Scale Surface Metrology
  Abstract

This paper provides an overview of advances in the surface metrology field, concerning surface creation, measurement need, instrumentation, characterisation methods and standard development. It indicates industry requirements and further developments for micro and nano scalar surface metrology.

  Info
Periodical
Key Engineering Materials (Volumes 295-296)
Edited by
Yongsheng Gao, Shuetfung Tse and Wei Gao
Pages
431-436
DOI
10.4028/www.scientific.net/KEM.295-296.431
Citation
L. Blunt, X. Jiang, P.J. Scott, "Advances in Micro and Nano-Scale Surface Metrology", Key Engineering Materials, Vols. 295-296, pp. 431-436, 2005
Online since
October 2005
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Price
$32.00
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