Paper Title:

Advances in Micro and Nano-Scale Surface Metrology

Periodical Key Engineering Materials (Volumes 295 - 296)
Main Theme Measurement Technology and Intelligent Instruments VI
Edited by Yongsheng Gao, Shuetfung Tse and Wei Gao
Pages 431-436
DOI 10.4028/www.scientific.net/KEM.295-296.431
Citation L. Blunt et al., 2005, Key Engineering Materials, 295-296, 431
Online since October, 2005
Authors L. Blunt, X. Jiang, P.J. Scott
Keywords Micro Scale, Nano-Scale, Surface Characterisation
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Abstract

This paper provides an overview of advances in the surface metrology field, concerning surface creation, measurement need, instrumentation, characterisation methods and standard development. It indicates industry requirements and further developments for micro and nano scalar surface metrology.