Advances in Micro and Nano-Scale Surface Metrology
| Periodical | Key Engineering Materials (Volumes 295 - 296) |
|---|---|
| Main Theme | Measurement Technology and Intelligent Instruments VI |
| Edited by | Yongsheng Gao, Shuetfung Tse and Wei Gao |
| Pages | 431-436 |
| DOI | 10.4028/www.scientific.net/KEM.295-296.431 |
| Citation | L. Blunt et al., 2005, Key Engineering Materials, 295-296, 431 |
| Online since | October, 2005 |
| Authors | L. Blunt, X. Jiang, P.J. Scott |
| Keywords | Micro Scale, Nano-Scale, Surface Characterisation |
| Price | US$ 28,- |
This paper provides an overview of advances in the surface metrology field, concerning surface creation, measurement need, instrumentation, characterisation methods and standard development. It indicates industry requirements and further developments for micro and nano scalar surface metrology.