Paper Title:
Development of a Large Range Nanometer Level Profilometer with Controlled Contact Force
  Abstract

A nanometer profilometer in which the measuring force can be controlled is proposed. The key part is the nanometer profiling core, which consists of a voice coil motor with a short and movable voice coil and an inductive transducer. According to the A/D value of the transducer signal, the measuring force can be adjusted to approximately µN level by use of a PID control algorithm. The advantages of contact type and non-contact type profilometer are possessed by the proposed instrument.

  Info
Periodical
Key Engineering Materials (Volumes 295-296)
Edited by
Yongsheng Gao, Shuetfung Tse and Wei Gao
Pages
489-494
DOI
10.4028/www.scientific.net/KEM.295-296.489
Citation
L. Yang, Y. Gao, X. Z. Wang, T. Xie, "Development of a Large Range Nanometer Level Profilometer with Controlled Contact Force", Key Engineering Materials, Vols. 295-296, pp. 489-494, 2005
Online since
October 2005
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Price
$32.00
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