Paper Title:
An Ultra-Precision Air-Pin Sensor and Its Dynamic Characteristics
  Abstract

The non-contact pneumatic measurement technique is useful for dimension measurement. The authors have developed a new type of air-pin pneumatic-electronic sensor. The ultra-precision air-pin sensor and the dynamic characteristics of the sensor are investigated. The measurement accuracy of the air-pin pneumatic-electronic sensor is better than 0.1µm for the 10µm measurement range. The response time is less then 10ms.

  Info
Periodical
Key Engineering Materials (Volumes 295-296)
Edited by
Yongsheng Gao, Shuetfung Tse and Wei Gao
Pages
557-562
DOI
10.4028/www.scientific.net/KEM.295-296.557
Citation
H. Zhang, S.X. Deng, H. Q. Wang, S. Chen, "An Ultra-Precision Air-Pin Sensor and Its Dynamic Characteristics", Key Engineering Materials, Vols. 295-296, pp. 557-562, 2005
Online since
October 2005
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Price
$32.00
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