Use of Fiber Interferometer for AFM Cantilever Probe Displacement Control |
| Journal |
Key Engineering Materials (Volumes 295 - 296) |
| Volume |
Measurement Technology and Intelligent Instruments VI |
| Edited by |
Yongsheng Gao, Shuetfung Tse and Wei Gao |
| Pages |
77-82 |
| DOI |
10.4028/www.scientific.net/KEM.295-296.77 |
| Online since |
October, 2005 |
| Authors |
N.C. Shie,
T.L. Chen,
Kai Yuan Cheng
|
| Keywords |
Atomic Force Microscope, Cantilever Probe, Fibre Interferometer |
| Abstract |
This investigation presents a fibre-optic Fabry-Perot interferometer as a displacement sensor in an atomic force microsope (AFM). A simple model of light wave transmission between two fibres with the same core diameter is proposed to determine the theoretical equation of light intensity of interference fringes from the fibre-optic Fabry-Perot interferometer. By replacing an AFM cantilever with a movable reflective mirror, the variations of relative light intensity of the interference fringes with the spacing between the fibre and the mirror were recorded. The theoretical equation for the light intensity of interference fringes was close to those obtained experimentally. Finally, a fibre-optic Fabry-Perot interferometer was operated in an AFM to image a two-dimensional phase array with a pitch of 4 µm and a depth of 150 nm. |
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