Pitch Calibration by an Active Temperature Controlled Traceable Atomic Force Microscope and a Laser Diffractometer |
| Journal |
Key Engineering Materials (Volumes 295 - 296) |
| Volume |
Measurement Technology and Intelligent Instruments VI |
| Edited by |
Yongsheng Gao, Shuetfung Tse and Wei Gao |
| Pages |
89-94 |
| DOI |
10.4028/www.scientific.net/KEM.295-296.89 |
| Citation |
Chao Jung Chen et al., 2005, Key Engineering Materials, 295-296, 89 |
| Online since |
October, 2005 |
| Authors |
Chao Jung Chen, S.P. Pan, L.C. Chang |
| Keywords |
Atomic Force Microscope (AFM), Laser Diffraction, Littrow Configuration, Metrology, Pitch Calibration |
| Full Paper |
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