Paper Title:
Pitch Calibration by an Active Temperature Controlled Traceable Atomic Force Microscope and a Laser Diffractometer
  Abstract

  Info
Periodical
Key Engineering Materials (Volumes 295-296)
Edited by
Yongsheng Gao, Shuetfung Tse and Wei Gao
Pages
89-94
DOI
10.4028/www.scientific.net/KEM.295-296.89
Citation
C. J. Chen, S.P. Pan, L.C. Chang, "Pitch Calibration by an Active Temperature Controlled Traceable Atomic Force Microscope and a Laser Diffractometer", Key Engineering Materials, Vols. 295-296, pp. 89-94, 2005
Online since
October 2005
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$32.00
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