Paper Title:

Pitch Calibration by an Active Temperature Controlled Traceable Atomic Force Microscope and a Laser Diffractometer

Periodical Key Engineering Materials (Volumes 295 - 296)
Main Theme Measurement Technology and Intelligent Instruments VI
Edited by Yongsheng Gao, Shuetfung Tse and Wei Gao
Pages 89-94
DOI 10.4028/www.scientific.net/KEM.295-296.89
Citation Chao Jung Chen et al., 2005, Key Engineering Materials, 295-296, 89
Online since October, 2005
Authors Chao Jung Chen, S.P. Pan, L.C. Chang
Keywords Atomic Force Microscope (AFM), Laser Diffraction, Littrow Configuration, Metrology, Pitch Calibration
Price US$ 28,-
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