Mechanical Properties of Photosensitive Polyimide Film by Nanoindentation and Microtensile Test

A free-standing photosensitive polyimide film with thickness of 10µm is fabricated with the different curing temperatures using a micro fabrication process. The microtensile specimens of a strip type are made to facilitate a tensile testing. The Young’s modulus and yield strength of photosensitive polyimide film are measured with various strain rates from 10-4 /s to 10-3 /s by using a microtensile test. Also, the hardness and Young’s modulus of polyimide films are obtained from nanoindentation test. Finally, the mechanical properties measured from microtensile test are compared with those from nanoindentation test.