The Characterization of Adhesion and Friction of PDMS Polymer for Nanoimprinting Lithography |
| Journal |
Key Engineering Materials (Volumes 297 - 300) |
| Volume |
Advances in Fracture and Strength |
| Edited by |
Young-Jin Kim, Dong-Ho Bae and Yun-Jae Kim |
| Pages |
269-274 |
| DOI |
10.4028/www.scientific.net/KEM.297-300.269 |
| Citation |
Shin Hur et al., 2005, Key Engineering Materials, 297-300, 269 |
| Online since |
November, 2005 |
| Authors |
Shin Hur, Sung In Hong |
| Keywords |
Adhesion, CCD Device, Contact Area, Friction, Nanoindenter, PDMS Polymer |
| Full Paper |
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