Force-Calibrated AFM for Mechanical Test of Freestanding Thin Films |
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| Journal | Key Engineering Materials (Volumes 297 - 300) |
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| Volume | Advances in Fracture and Strength |
| Edited by | Young-Jin Kim, Dong-Ho Bae and Yun-Jae Kim |
| Pages | 275-279 |
| DOI | 10.4028/www.scientific.net/KEM.297-300.275 |
| Citation | Hak Joo Lee et al., 2005, Key Engineering Materials, 297-300, 275 |
| Online since | November, 2005 |
| Authors | Hak Joo Lee, Ki Ho Cho, Jae Hyun Kim, Seung Woo Han, Byung Ik Choi, Chang Wook Baek, Jong Man Kim, Sung Hoon Choa |
| Keywords | Atomic Force Microscope (AFM), Au, Calibration, Cantilever, Freestanding Thin Film, Mechanical Testing |
| Abstract | Atomic force microscope (AFM) is a powerful tool for exploring a nano-scale world. It can measure a nano-scale surface topography with very high resolution and detect a very small force. In this paper, we propose a novel AFM cantilever and its calibration scheme to utilize AFM as a mechanical testing machine. We call this AFM with a new cantilever as a force-calibrated AFM. The feasibility of the AFM cantilever is validated through measurement of mechanical properties of freestanding Au thin films. |
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