Paper Title:
Strength Analysis of MEMS Micromirror Devices - Effects of Loading Mode and Etching Damage
  Abstract

Strength evaluation method for MEMS micromirror has been proposed. Pure bending and combined loading tests have been performed and torsion strength has been estimated from those results. Two-parameter Weibull distribution was used to evaluate the fractured stresses estimated from FEM model. There exists the difference in strength between pure bending and combined loading. From the load factor analysis, it is found that both geometry and stress distribution have to be considered to estimate the strength of MEMS since flaw population is non-uniformly distributed. It is also found torsional strength can be estimated on the safe side by using the result of combined loading test. From the comparison between two kinds of specimen fabricated by different etching conditions, it is found that the fracture strength is greatly affected by the amount of etching damage (notching).

  Info
Periodical
Key Engineering Materials (Volumes 297-300)
Edited by
Young-Jin Kim, Dong-Ho Bae and Yun-Jae Kim
Pages
527-532
DOI
10.4028/www.scientific.net/KEM.297-300.527
Citation
S. Izumi, C. W. Ping, M. Yamaguchi, S. Sakai, A. Suzuki, Y. Ueda, "Strength Analysis of MEMS Micromirror Devices - Effects of Loading Mode and Etching Damage ", Key Engineering Materials, Vols. 297-300, pp. 527-532, 2005
Online since
November 2005
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Dal Woo Jung, Nak Sam Choi
Abstract:Fatigue fracture behavior of a hybrid joint part for the tilting car body was evaluated in comparison to the case of static fracture. The...
2860
Authors: Shu Huang, Jian Zhong Zhou, Yi Bin Chen, C.D. Wang, X.D. Yang, Y.C. Dai
Abstract:An appropriate finite element analytical model for laser compound forming (LCF) was established with ABAQUS code, and then some key technical...
3857
Authors: Wu Zhao, De Jie Chen
Abstract:Fatigue failure is the most common failure mode of boring bar in the deep-hole boring processing system. For solving the problem of fatigue...
2264
Authors: Jin Feng Geng, Hong Sheng Cai, Xing Pei Liang, Hui Wang, Yu Jie Wang, Zhao Hua Wang
Chapter 5: Computational Mechanics
Abstract:The linear elastic problem for two welded thin-walled steel tubes containing circular arc weld defect subjected to bending load is analyzed...
1711