Paper Title:
Development of Full-Reversed Bending Fatigue Tester Based on AFM Technique for Cyclic Damage Evaluation of MEMS
  Abstract

  Info
Periodical
Key Engineering Materials (Volumes 297-300)
Edited by
Young-Jin Kim, Dong-Ho Bae and Yun-Jae Kim
Pages
567-573
DOI
10.4028/www.scientific.net/KEM.297-300.567
Citation
Y. Isono, T. Kikuchi, H. Kitoh, "Development of Full-Reversed Bending Fatigue Tester Based on AFM Technique for Cyclic Damage Evaluation of MEMS ", Key Engineering Materials, Vols. 297-300, pp. 567-573, 2005
Online since
November 2005
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Price
$32.00
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