A new measuring method and analyzing procedure were proposed to determine the complex dielectric permittivity of materials with relatively high permittivity using an RF-impedance analyzer. Samples used for the measurement were (Ba0.6Sr0.4)TiO3 and Ba(Zr0.25Ti0.75)O3 ceramics. Micro planar electrodes were used for the measurement of complex admittance of these samples. Electromagnetic simulations were carried out for determining the relative dielectric permittivity and dielectric loss. The complex dielectric permittivity vs. frequency curves of Ba(Zr0.25Ti0.75)O3 showed a broad dielectric relaxation, while that of (Ba0.6Sr0.4)TiO3 was almost flat up to 3 GHz.