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Microfabrication of Thermoelectric Hydrogen Sensor Using KOH Solution Etching

Journal Key Engineering Materials (Volume 301)
Volume Electroceramics in Japan VIII
Edited by Masaru Miyayama, Tadashi Takenaka, Masasuke Takata and Kazuo Shinozaki
Pages 273-276
DOI 10.4028/www.scientific.net/KEM.301.273
Citation Kazuki Tajima et al., 2006, Key Engineering Materials, 301, 273
Online since January, 2006
Authors Kazuki Tajima, Yeong Soo Choi, Woosuck Shin, Noriya Izu, Ichiro Matsubara, Norimitsu Murayama
Keywords Catalyst, Hydrogen Sensor, Micro-Hotplate, Thermoelectric, Wet Etching
Abstract

Micromachined sensors are a new generation of sensor technology combining existing integrated circuit fabrication technology with novel deposition and etching processing. In the viewpoint of low-power operation, high sensitivity and fast response speed of thermoelectric hydrogen sensor (THS), we prepared the micromachined thermoelectric hydrogen sensor (micro-THS) with the combination of the thermoelectric effect of SiGe thin film and the Pt-catalyzed exothermic reaction of hydrogen oxidation. The power consumption of the micro-THS was greatly reduced to be 50 mW for 100 °C operating, by the Pt-micro-heater on single membrane. The micro-THS with 40 wt.% Pt/alumina catalyst showed voltage signal of 10 mV for 1 % H2 in air.

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