Microfabrication of Thermoelectric Hydrogen Sensor Using KOH Solution Etching |
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| Journal | Key Engineering Materials (Volume 301) |
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| Volume | Electroceramics in Japan VIII |
| Edited by | Masaru Miyayama, Tadashi Takenaka, Masasuke Takata and Kazuo Shinozaki |
| Pages | 273-276 |
| DOI | 10.4028/www.scientific.net/KEM.301.273 |
| Citation | Kazuki Tajima et al., 2006, Key Engineering Materials, 301, 273 |
| Online since | January, 2006 |
| Authors | Kazuki Tajima, Yeong Soo Choi, Woosuck Shin, Noriya Izu, Ichiro Matsubara, Norimitsu Murayama |
| Keywords | Catalyst, Hydrogen Sensor, Micro-Hotplate, Thermoelectric, Wet Etching |
| Abstract | Micromachined sensors are a new generation of sensor technology combining existing integrated circuit fabrication technology with novel deposition and etching processing. In the viewpoint of low-power operation, high sensitivity and fast response speed of thermoelectric hydrogen sensor (THS), we prepared the micromachined thermoelectric hydrogen sensor (micro-THS) with the combination of the thermoelectric effect of SiGe thin film and the Pt-catalyzed exothermic reaction of hydrogen oxidation. The power consumption of the micro-THS was greatly reduced to be 50 mW for 100 °C operating, by the Pt-micro-heater on single membrane. The micro-THS with 40 wt.% Pt/alumina catalyst showed voltage signal of 10 mV for 1 % H2 in air. |
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