Paper Title:
Microfabrication of Thermoelectric Hydrogen Sensor Using KOH Solution Etching
  Abstract

Micromachined sensors are a new generation of sensor technology combining existing integrated circuit fabrication technology with novel deposition and etching processing. In the viewpoint of low-power operation, high sensitivity and fast response speed of thermoelectric hydrogen sensor (THS), we prepared the micromachined thermoelectric hydrogen sensor (micro-THS) with the combination of the thermoelectric effect of SiGe thin film and the Pt-catalyzed exothermic reaction of hydrogen oxidation. The power consumption of the micro-THS was greatly reduced to be 50 mW for 100 °C operating, by the Pt-micro-heater on single membrane. The micro-THS with 40 wt.% Pt/alumina catalyst showed voltage signal of 10 mV for 1 % H2 in air.

  Info
Periodical
Edited by
Masaru Miyayama, Tadashi Takenaka, Masasuke Takata and Kazuo Shinozaki
Pages
273-276
DOI
10.4028/www.scientific.net/KEM.301.273
Citation
K. Tajima, Y. S. Choi, W. Shin, N. Izu, I. Matsubara, N. Murayama, "Microfabrication of Thermoelectric Hydrogen Sensor Using KOH Solution Etching", Key Engineering Materials, Vol. 301, pp. 273-276, 2006
Online since
January 2006
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Price
$32.00
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