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Integration of Ceramic Catalyst on Micro-Hotplate of Thermoelectric Hydrogen Sensor

Journal Key Engineering Materials (Volume 301)
Volume Electroceramics in Japan VIII
Edited by Masaru Miyayama, Tadashi Takenaka, Masasuke Takata and Kazuo Shinozaki
Pages 277-280
DOI 10.4028/www.scientific.net/KEM.301.277
Citation Yeong Soo Choi et al., 2006, Key Engineering Materials, 301, 277
Online since January, 2006
Authors Yeong Soo Choi, Kazuki Tajima, Woosuck Shin, Naoya Sawaguchi, Noriya Izu, Ichiro Matsubara, Norimitsu Murayama
Keywords Ceramic Catalyst, DIspenser Technique, Micro-Hotplate, Thermoelectric Hydrogen Sensor
Abstract

To integrate the ceramic Pt/alumina catalyst on micro-hotplate of micro-thermoelectric hydrogen sensor (micro-THS), a dispenser technique was used in this study. This micro-THS with the Pt/alumina catalyst is capable of sensing wide range hydrogen concentration of 50 ppm to 3 % at room temperature. For hydrogen/air mixture gas of 50 ppm, voltage signal is measured to be 0.03 mV at room temperature.

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