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Raman Piezo-Spectroscopic Investigation of Microscopic Residual Stresses in Ni-MLCC Devices

Journal Key Engineering Materials (Volume 301)
Volume Electroceramics in Japan VIII
Edited by Masaru Miyayama, Tadashi Takenaka, Masasuke Takata and Kazuo Shinozaki
Pages 31-36
DOI 10.4028/www.scientific.net/KEM.301.31
Citation Tatsuo Sakashita et al., 2006, Key Engineering Materials, 301, 31
Online since January, 2006
Authors Tatsuo Sakashita, Kentaro Nakamura, Giuseppe Pezzotti, Hirokazu Chazono
Keywords Ni-MLCC, Piezo-Spectroscopy, Raman Microprobe, Residual Stress
Abstract

Residual stresses in Ni-MLCC were investigated by Raman microprobe piezo-spectroscopic (PS) methods. The shape of the Raman spectrum of BaTiO3 in Ni-MLCC depended on the angle between the polarizing direction of the incident laser beam and the direction of the internal electrode. From a set of precise calibrations, we show that the orientation dependence arises from the interaction between internal stresses and the polycrystalline microstructure; by taking into account such an orientation dependence, we were able to establish a technique for the measurement of the distribution of residual stresses in Ni-MLCC.

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