Fabrication of Flat PZT Cantilevers through MEMS Technologies and Application to Optical MEMS |
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| Journal | Key Engineering Materials (Volume 301) |
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| Volume | Electroceramics in Japan VIII |
| Edited by | Masaru Miyayama, Tadashi Takenaka, Masasuke Takata and Kazuo Shinozaki |
| Pages | 37-40 |
| DOI | 10.4028/www.scientific.net/KEM.301.37 |
| Citation | Takeshi Kobayashi et al., 2006, Key Engineering Materials, 301, 37 |
| Online since | January, 2006 |
| Authors | Takeshi Kobayashi, Jiunnjye Tsaur, Masaaki Ichiki, Ryutaro Maeda |
| Keywords | Cantilever, Film, Micro-Electromechanical Systems (MEMS), Optical MEMS, PZT, Scanner |
| Abstract | Flat PZT cantilevers have been successfully fabricated from the Pt/Ti/PZT/Pt/Ti/SiO2/SOI multi-layered structure through MEMS technologies. A displacement of the tip of the cantilever driven at 6 V is measured to be 7.6 μm and the transverse piezoelectric constant calculated from the displacement is –103 pm/V. 1D optical scanners have been designed, simulated, fabricated and tested. The rotation angles of the mirror of the scanners were 60-70% of the simulated values. |
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