Paper Title:
Fabrication of Flat PZT Cantilevers through MEMS Technologies and Application to Optical MEMS
  Abstract

Flat PZT cantilevers have been successfully fabricated from the Pt/Ti/PZT/Pt/Ti/SiO2/SOI multi-layered structure through MEMS technologies. A displacement of the tip of the cantilever driven at 6 V is measured to be 7.6 μm and the transverse piezoelectric constant calculated from the displacement is –103 pm/V. 1D optical scanners have been designed, simulated, fabricated and tested. The rotation angles of the mirror of the scanners were 60-70% of the simulated values.

  Info
Periodical
Edited by
Masaru Miyayama, Tadashi Takenaka, Masasuke Takata and Kazuo Shinozaki
Pages
37-40
DOI
10.4028/www.scientific.net/KEM.301.37
Citation
T. Kobayashi, J. Tsaur, M. Ichiki, R. Maeda, "Fabrication of Flat PZT Cantilevers through MEMS Technologies and Application to Optical MEMS", Key Engineering Materials, Vol. 301, pp. 37-40, 2006
Online since
January 2006
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Price
$32.00
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