Preparation and Characterization of PZT Thin Films on ITO/Glass Substrate by CSD |
|
| Journal | Key Engineering Materials (Volume 301) |
|---|---|
| Volume | Electroceramics in Japan VIII |
| Edited by | Masaru Miyayama, Tadashi Takenaka, Masasuke Takata and Kazuo Shinozaki |
| Pages | 41-44 |
| DOI | 10.4028/www.scientific.net/KEM.301.41 |
| Citation | Tomoya Ohno et al., 2006, Key Engineering Materials, 301, 41 |
| Online since | January, 2006 |
| Authors | Tomoya Ohno, Masayuki Fujimoto, Hisao Suzuki |
| Keywords | CSD, Electrical Property, Glass Substrate, PZT Thin Film, Transparent Ferroelectric Thin Film |
| Abstract | This paper describes the deposition of PZT thin films on soda-lime glass substrate with ITO bottom electrode by CSD (Chemical Solution Deposition). The transmittance of the obtained PZT thin film on ITO/glass substrate was about 60 % in the visible light region. The deposited transparent PZT thin film exhibited the ferroelectricity of Pr=36.3 μC/cm2 and Ec=71.3 kV/cm. In addition, the piezoelectric property of the resultant PZT thin film was relatively large and exhibited the measured effective d33 of 120 pC/N after the polarization. |
| Full Paper | 
Get the full paper by clicking here
|
First page example
