Preparation and Characterization of PZT Thin Films on ITO/Glass Substrate by CSD |
| Journal |
Key Engineering Materials (Volume 301) |
| Volume |
Electroceramics in Japan VIII |
| Edited by |
Masaru Miyayama, Tadashi Takenaka, Masasuke Takata and Kazuo Shinozaki |
| Pages |
41-44 |
| DOI |
10.4028/www.scientific.net/KEM.301.41 |
| Online since |
January, 2006 |
| Authors |
Tomoya Ohno,
Masayuki Fujimoto,
Hisao Suzuki
|
| Keywords |
CSD, Electrical Property, Glass Substrate, PZT Thin Film, Transparent Ferroelectric Thin Film |
| Abstract |
This paper describes the deposition of PZT thin films on soda-lime glass substrate with ITO bottom electrode by CSD (Chemical Solution Deposition). The transmittance of the obtained PZT thin film on ITO/glass substrate was about 60 % in the visible light region. The deposited transparent PZT thin film exhibited the ferroelectricity of Pr=36.3 μC/cm2 and Ec=71.3 kV/cm. In addition, the piezoelectric property of the resultant PZT thin film was relatively large and exhibited the measured effective d33 of 120 pC/N after the polarization. |
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