Paper Title:
Dielectric and Piezoelectric Properties of Ba(Ti,Zr)O3 Thin Films Consisted of Nano-Crystals
  Abstract

Lead-free Ba(Ti1-xZrx)O3 (BTZ) thin films were fabricated on Pt(111)/Ti/SiO2/Si(100) substrates by the chemical solution deposition (CSD) process. The microstructure of the BTZ (x = 0.00 to 0.20) thin films was improved by additional sintering process, and their crystallite sizes were increased in each composition. The dielectric constant er and piezoelectric constant d33 of the BTZ thin films depended on the crystallite size. We give a guide for further investigation to improve the characteristics of BTZ thin films.

  Info
Periodical
Edited by
Masaru Miyayama, Tadashi Takenaka, Masasuke Takata and Kazuo Shinozaki
Pages
53-56
DOI
10.4028/www.scientific.net/KEM.301.53
Citation
K. Tanaka, K. Suzuki, T. Kimura, K. Nishizawa, T. Miki, K. Kato, "Dielectric and Piezoelectric Properties of Ba(Ti,Zr)O3 Thin Films Consisted of Nano-Crystals", Key Engineering Materials, Vol. 301, pp. 53-56, 2006
Online since
January 2006
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$32.00
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