Development of Lead-Free Piezoelectric Thick Films with a/b-Axis-Oriented Bi4-xPrxTi3O12 |
| Journal |
Key Engineering Materials (Volume 301) |
| Volume |
Electroceramics in Japan VIII |
| Edited by |
Masaru Miyayama, Tadashi Takenaka, Masasuke Takata and Kazuo Shinozaki |
| Pages |
61-64 |
| DOI |
10.4028/www.scientific.net/KEM.301.61 |
| Online since |
January, 2006 |
| Authors |
Hirofumi Matsuda,
Takashi Iijima
|
| Keywords |
Bismuth Layer-Structured Ferroelectrics, Chemical Solution Deposition, Orientation Control, Piezo MEMS, Poly-Crystalline Thick Film |
| Abstract |
Pr-substituted Bi4Ti3O12 (BPT, Bi4-xPrxTi3O12, x=0.1-0.4) polycrystalline thick films with a-/b-axes orientations and thickness of 2-3 μm were grown on sputter-grown IrO2 layers by chemical solution deposition method for developing lead-free piezoelectric film microdevices. Electric-field-induced strains measurements were performed by double-beam laser displacement meter and longitudinal strain of e=0.25 % under 400 kV/cm and piezoelectric coefficient d33=63 pm/V at 10 Hz were observed in BPT thick film of x=0.1 with a-/b-axes mixed orientations. The value of strain closely related to spontaneous polarization and monotonously decreased with increasing x. Microstructures of 3 μm-thick BPT films were fabricated by photolithography and dry etching processes with several tens micrometers in size. |
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