Analysis of Dynamic Characteristics in Polishing Based on Two-Dimension Vibration of Fluid

A novel polishing technique based on the two-dimension vibration of fluid is put forward to obtain ultra-smooth surface without damage. In operation, the polishing pad is replaced by fluid where fine abrasive particles are mixed, and the impact and grinding effect can be produced by means of the vibration of fluid and the relative motion of workpiece. It can achieve the ultra-precise polishing for all kinds of planes and curved surfaces. A finite element method is employed to analyze the dynamic behaviors, including vibration mode and harmonic response under the action of the exciter, and the fluid field based on two-dimension vibration is simulated.