Paper Title:

Study on Ultra-Precise Machining of CLBO Crystal

Periodical Key Engineering Materials (Volumes 304 - 305)
Main Theme Advances in Grinding and Abrasive Technology XIII
Edited by Guangqi Cai, Xipeng Xu and Renke Kang
Pages 398-402
DOI 10.4028/www.scientific.net/KEM.304-305.398
Citation Xun Lv et al., 2006, Key Engineering Materials, 304-305, 398
Online since February, 2006
Authors Xun Lv, Ju Long Yuan, Yong Dai, Jia Jin Zheng, Zhao Zhong Zhou, Ping Zhao
Keywords CLBO, Lapping Slurry, Polishing Slurry, Ultra-Precise Machining
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Abstract

Cesium Lithium Borate (CsLiB6O10 or CLBO) is the most effective non-linear crystal which generates ultraviolet harmonics of the Nd:YAG fundamental laser wavelength. In order to enhance the damage threshold, low CLBO surface roughness, by ultra-precision machining, is needed. Because the CLBO crystal has easy hydroscopic reaction and micro scratches in machining, ultra-precise machining of the CLBO crystal is a difficult technical problem. In this paper, the new lapping slurry and polishing slurry are introduced. And the deliquescence degree of CLBO is fallen to lowest. A new working technology is also adopted. After rough polishing, the concentration of ultra-precision polishing slurry is increased properly. So does the ultra-precision polishing speed, and the wiping speed is faster than the deliquescence speed. The CLBO crystal surface roughness can achieve 1nm and keep the surface quality well.