Paper Title:
Design and Analysis of Micro Electrostatic Deformable Focusing Mirror Actuated by Hemispherical Electrode
  Abstract

Deformable focusing micromirror is one of the important optical MEMS devices. The focusing length is determined by the profile of the micromirror surface. For uniform deformation, based on bulk microfabrication of isotropic etching and wafer bonding, a novel micro electrostatic deformable focusing mirror actuated by hemispherical electrode is designed and analyzed. Due to the coupling between elastic and electrostatic force, numerical method of finite element using ANASYS software is used to analyze the deformations and stresses of different structure sizes. The phenomenon that structures deform abruptly fast due to nonlinear increasing electrostatic force called pull-in is also discussed. Using the least square method, the profile of micro focusing mirror can be curve fitting as a parabola. And the focal length can be obtained. The results show deformation increases nonlinearly as applying voltages increasing. The stresses increase linearly when thickness also increase but nonlinearly when radius of mirror increases. The maximum stress happens in the region of bounded. The focal length decreases quasi-linearly as applying voltage increases. The mirror sizes and gaps have effect on pull-in voltages. Larger gap and smaller mirror radius will cause larger pull-in voltage.

  Info
Periodical
Key Engineering Materials (Volumes 306-308)
Edited by
Ichsan Setya Putra and Djoko Suharto
Pages
1235-1240
DOI
10.4028/www.scientific.net/KEM.306-308.1235
Citation
P.-L. Chang, M. J. Lin, "Design and Analysis of Micro Electrostatic Deformable Focusing Mirror Actuated by Hemispherical Electrode", Key Engineering Materials, Vols. 306-308, pp. 1235-1240, 2006
Online since
March 2006
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Li Tian, Xiao Ying Li, Da Yong Qiao, Bin Yan
Abstract:A new type of continuous face-sheet micro deformable mirror was designed and fabricated based on SOI (Silicon-on-Insulator) technology for...
185
Authors: Yan Jue Gong, Zhao Fu, Hui Yu Xiang, Li Zhang, Chun Ling Meng
Abstract:As the important elements in adaptive optical system used for food safety detection instrument, Micro-deformable mirrors are typical...
69
Authors: Hiroki Nakamori, Satoshi Matsuyama, Shota Imai, Takashi Kimura, Yasuhisa Sano, Yoshiki Kohmura, Kenji Tamasaku, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi
Chapter 1: High Precision Machining
Abstract:Ultraprecise piezoelectric deformable mirrors have been developed to construct adaptive X-ray focusing optics whose optical parameters can be...
50
Authors: Wei Min Wang, Feng Gang Tao, Jian Fei Zhang, Jun Yao
Chapter 1: Micro/Nano Transducer/Acutar/Robot
Abstract:A new hexagonal actuator arrangement continuous face-sheet MEMS deformable mirror is proposed, a mirror array with 19 elements is fabricated...
169
Authors: Zhi Zheng Wu, Mei Liu
Chapter 2: Mechanics Study in Mechanical Engineering, Industry and Manufacturing Engineering
Abstract:Magnetic fluid based liquid mirrors represent a promising technology. Compared with the conventional solid mirrors, magnetic fluid deformable...
409