Paper Title:
Mechanical Properties of Al-3%Ti Thin Film for Reliability Analysis of RF MEMS Switch
  Abstract

This paper presents a novel experimental method to investigate the strength of material, Al-3%Ti, which is commonly used in RF(radio frequency) microelectromechanical systems(MEMS) switch. The experimental method involves the development of a new tensile loading system. The new tensile loading system has a load cell with maximum capacity of 0.5N and a non-contact position measuring system based on the principle of capacitance micrometry with 0.1nm resolution for displacement measurement. A voice coil of audio speaker is used as the actuator of the loading system. And new specimen was designed and fabricated to easily manipulate, align and grip a thin-film for a tensile and fatigue test. The material used in this study was Al-3%Ti thin film, which was used in RF switch. The thickness and width of the thin film of specimen are 1.1µm and 480µm, respectively. The holes at center of grip end are able to make alignment and gripping easy. The bridges are to remove the side supports easily and extract specimen from wafer without sawing. Tensile tests were performed on 5 specimens. The ultimate strength of Al-3%Ti was 144MPa.

  Info
Periodical
Key Engineering Materials (Volumes 306-308)
Edited by
Ichsan Setya Putra and Djoko Suharto
Pages
1319-1324
DOI
10.4028/www.scientific.net/KEM.306-308.1319
Citation
J. H. Park, Y. J. Kim, S. H. Choa, "Mechanical Properties of Al-3%Ti Thin Film for Reliability Analysis of RF MEMS Switch", Key Engineering Materials, Vols. 306-308, pp. 1319-1324, 2006
Online since
March 2006
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Price
$32.00
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