Paper Title:
Molecular Dynamics Simulation of Nano-Indentation of Carbon Coated Monocrystalline Silicon
  Abstract

This paper presents the molecular dynamics (MD) simulation of nano-indentation of diamond-like carbon (DLC) coating on silicon substrates. It is found that the mechanisms of nanoindentation of coated systems on the nanometre scale defers considerably from the same process on the micrometre scale. The coating thickness affects the mechanisms of plastic deformation both in the coating and the substrate.

  Info
Periodical
Edited by
Hong-Yuan Liu, Xiaozhi Hu and Mark Hoffman
Pages
351-356
DOI
10.4028/www.scientific.net/KEM.312.351
Citation
W. C. D. Cheong, L. C. Zhang, "Molecular Dynamics Simulation of Nano-Indentation of Carbon Coated Monocrystalline Silicon", Key Engineering Materials, Vol. 312, pp. 351-356, 2006
Online since
June 2006
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