Paper Title:
Genetic-Based Optimal Design of a PID Controller for Substrate Temperature in a HFCVD System
  Abstract

In large-area HFCVD system, substrate temperature is a key factor which deeply affects the quality of diamond films. It is hard for traditional PID method to control the temperature efficiently. This paper presents a genetic- based PID control scheme for the control of in HFCVD system. Computer simulation and experiment on the system are performed. The results show that the controller designed upon GAs has good dynamic quality and steady-state precision, could meet well the need of the temperature control during depositing diamond films.

  Info
Periodical
Key Engineering Materials (Volumes 315-316)
Edited by
Zhejun Yuan, Xipeng Xu, Dunwen Zuo, Julong Yuan and Yingxue Yao
Pages
501-506
DOI
10.4028/www.scientific.net/KEM.315-316.501
Citation
S. L. Song, D. W. Zuo, G. B. Bu, M. Wang, "Genetic-Based Optimal Design of a PID Controller for Substrate Temperature in a HFCVD System ", Key Engineering Materials, Vols. 315-316, pp. 501-506, 2006
Online since
July 2006
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Jing Tang, Yun An Hu, Jing Li
Abstract:On the basis of sufficient analysis to the characteristic of iterative learning control and PID controller parameter tuning, an idea of...
511
Authors: Yang Cao, Zhan Shuang Hu, Wei Ping Zhao
Chapter 11: Environmental Protection and Economic Development
Abstract:The PID control is a popularly control method that used in control systems, which is still adopted in many practical application...
1795
Authors: Li Mei Wang, Yue Pang
Chapter 28: Precision Molding Processes
Abstract:To achieve high precision contour tracking control for Permanent Magnet Linear Synchronous motor drive X-Y table, genetic algorithm was used...
7104
Authors: Yi Shen, Qi Wang, Zhao Li Ye, Juan Chen, Ming Xin Yuan
Chapter 4: Mechatronics System Modeling and Identification
Abstract:To solve the motion control of mobile robot, a PID control optimized by improved immune clonal algorithm is presented. On the basis of immune...
269
Authors: Jian Hu Jiang, Chao Wu, Gang Zhang
Chapter 2: Applied Mechanics and Mechanical Engineering
Abstract:In this paper, fuzzy self-tuning controller is introduced first. The fuzzy model is built according to the experience of PID parameter tuning...
1133